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We have the answer: IPDIA SILICON CAPACITORS
IPDIA has patented a way to etch capacitors not just on the wafer surface like conventional silicon caps which have been around for a while,but tunneling down into the silicon to increase surface area and thus capacitance density to rival tantalum and multi layer ceramics, with all the advantages of silicon wafer technology;
Announcing a breakthrough in silicon capacitor technology: 3D silicon capacitors. Manufactured by IPDIA distributed by Allied International SAMPLES IN STOCK NOW
Custom design. IC can be mounted directly to the silicon interposer with all the support passives like capacitors, resistors and diodes embedded in the silicon.